| 摘要 |
PROBLEM TO BE SOLVED: To set voltages to be applied to a movable electrode and a fixed electrode low, to make the entirety small-sized, and to improve the reliability by stabilizing light switching operation. SOLUTION: On a substrate 11, a 1st movable body 12, 2nd movable bodies 16 and 16, and a 3rd movable body 21 are provided. The movable body 12 has a movable part 13 supported by a support beam 14 and a mirror part 15A which switches light is provided at its end part. The movable bodies 16 and 16 which drive the movable body 12 are arranged obliquely by the movable part 13 and has a movable part 17 supported by a support beam 18 and forms a movable electrode 19. A fixed electrode 20 is provided opposite the movable electrode 19. The movable body 21 which holds the position of the movable body 12 has a movable part 22 supported by a support beam 23 and forms a movable electrode 24. A fixed electrode 25 is provided opposite the movable electrode 24. COPYRIGHT: (C)2003,JPO
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