| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly accurate magnetic field sensor measuring a magnetic field generated from a measurement object in a high frequency band ranging from a mega-helz band to a giga-helz band with high sensitiveness and high spatial resolution. SOLUTION: Detection is carried out by means of this magnetic field sensor structured by passing a probe, which is constructed of a structural material covered with a thin film high magnetic permeability soft magnetic body, through an opened hole on the inside of a coil. A sharp point of the probe is brought close to the measurement object so that a change of the magnetic field generated by the measurement object in the vicinity of the point part is outputted as a voltage change between both ends of the coil. COPYRIGHT: (C)2003,JPO
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