摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sealing device achieving superior sealability in sealing a vacuum state. <P>SOLUTION: The magnetic fluid 14 as hardly-separatable lubricant of an oil film necessary for sealing, is constantly held between tips of a pair of magnets 12, 13, and the uniform oil film is constantly formed by the magnetic fluid 14 between an O-ring and a shaft 2, whereby the sealability suitable for sealing the vacuum state is achieved. The worn-power and the dust generated in accompany with reciprocating motion is captured by the magnetic fluid 14, whereby the worn-powder and the dust are eliminated. <P>COPYRIGHT: (C)2003,JPO |