METHOD FOR PRODUCING PHOTONIC CRYSTAL, MASK, MASK PRODUCING METHOD AND OPTICAL DEVICE PRODUCING METHOD

摘要

PROBLEM TO BE SOLVED: To solve the problem that it is required to connect the photonic crystals of respective wavelengths in a column on an optical axis or through an optical waveguide for conventional photonic crystals having a single cycle. SOLUTION: A method for producing the photonic crystal comprises a first step of providing a thin film core 9 to be the producing object of the photonic crystal and a second step of irradiating a mask 8 having through-holes 2 arrayed on the basis of a predetermined cycle structure for every area and a mask substrate 1 holding the through-holes 2 with ion beams 11. The mask 8 is constituted such that the beam 11 practically passes through only the through-holes 2 when it is irradiated with the beam 11 in the second step, the direction of the array corresponds to the direction of the primitive lattice vector of the photonic crystal, and the direction corresponding to the direction of at least one primitive lattice vector in each area matches for all the areas. COPYRIGHT: (C)2003,JPO