Method for manufacturing liquid crystal display

摘要

A method for manufacturing a liquid crystal display is provided. The method includes the steps of forming a gate electrode and a gate line on a substrate, wherein said gate electrode and said gate line comprises at least one refractory metal layer; forming an insulating film on said gate electrode and said gate line; forming an amorphous silicon film pattern and a doped amorphous silicon film pattern on said insulating film, wherein said doped amorphous silicon film pattern is formed entirely on said amorphous silicon film pattern and a whole bottom surface of said doped amorphous silicon film pattern is directly contacted to said amorphous silicon film pattern; forming a source electrode and a drain electrode composed of a third metal film and then etching away a portion of said doped amorphous silicon film pattern located between said source electrode and said drain electrode; forming a protection film pattern having a first contact hole which exposes a portion of said drain electrode and a second contact hole which exposes a portion of said gate line, wherein said protection film pattern contacts a top surface of said amorphous silicon pattern located between said source electrode and said drain electrode and said insulating film under said second contact hole is etched away to expose a portion of said gate line; and forming a first pixel electrode pattern which is connected to said drain electrode through said first contact hole and a second pixel electrode pattern which is electrically connected to said gate line through said second contact hole. It is thus possible to reduce the number of photolithography processes and to prevent a battery effect and generation of a hillock.