| 摘要 |
An improved device for generating oxygen radicals (atoms) from air is provided for the purpose of cleaning the specimen and interior specimen chamber of Electron Microscopes, and similar high vacuum chambers. The device is an electrode that is able to generate a plasma at very low RF power without magnetic confinement to suppress production of Nitrogen ions and NO+ ions while producing oxygen radicals from air. The electrode is a cylindrical screen that produces multiple hollow cathodes with RF induction trapping of electrons and allows the flow of molecules, radicals, and ions by convection through it. The electrode device is used in a RF Plasma oxygen-radical generator placed on a specimen chamber port of an electron microscope with a RF excitation source to create a low-power plasma inside the generator.
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