发明名称 |
Nanometer-order mechanical vibrator, production method thereof and measuring device using it |
摘要 |
There are provided a stable and highly sensitive nanometric mechanical oscillator having a considerably high detection resolution that enables detection of variation in force or mass on the nanometer order, as well as a method of fabricating the same, and a measurement apparatus using the same.A nanometric mechanical oscillator (10) includes a base (11), a tetrahedral oscillator mass (13); and an elastic neck portion (12) for connecting the base (11) and the tetrahedral oscillator mass (13). The oscillator (10) assumes a mushroom-like shape and has a nanometric size. The oscillator mass (13) assumes a tetrahedral shape and is suitable to be used as a probe of a scanning forth microscope in which the oscillator mass (13) serving as a probe is caused to approach to an arbitrary sample surface in order to observe the surface state.
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申请公布号 |
US6611178(B1) |
申请公布日期 |
2003.08.26 |
申请号 |
US20010009560 |
申请日期 |
2001.12.14 |
申请人 |
JAPAN SCIENCE AND TECHNOLOGY CORPORATION |
发明人 |
KAWAKATSU HIDEKI;TOSHIYOSHI HIROSHI |
分类号 |
G01P3/12;B81B1/00;B81B3/00;B82B1/00;B82B3/00;G01B21/30;G01L1/04;G01P15/00;G01P15/02;G01P15/08;G01P15/097;G01Q10/00;G01Q10/04;G01Q20/02;G01Q20/04;G01Q60/22;G01Q60/32;G01Q60/38;G01Q60/42;G01Q70/06;G01Q70/12;G01Q70/16;G11B9/00;G11B9/14;H01L29/84;H01L41/08;H01L41/09;H03H9/02;(IPC1-7):B81B3/00;B81C1/00 |
主分类号 |
G01P3/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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