| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To solve the problem that ceramic as the function material of a heating mechanism is hardly desired since the ceramic used as the constitution material of the heating mechanism is superior in resistance to contamination, resistance to heat, etc., in a conventional holding apparatus of a body to be treated. <P>SOLUTION: The holding device is provided with a heating resistor 11 for heating a wafer, an insulation body 12 supporting the heating resistor 11, a heat conductor 13 arranged superposed on the insulation body 12 and supporting the wafer, and a bolt (not shown) for connecting and integrating the heat conductor 13 and the insulation body 12 by their respective peripheral parts. <P>COPYRIGHT: (C)2003,JPO</p> |
