VIBRATION ISOLATING COUPLING HAVING ELASTOMER FOR SCANNING ELECTRON MICROSCOPE AND THE LIKE

摘要

PROBLEM TO BE SOLVED: To provide a new improved coupling between a carrier chamber fixed in a given position and an inspection chamber floating on a vibration insulating system. SOLUTION: In a measuring system, a coupling is situated between a floating inspection chamber and a fixed carrier chamber. The coupling comprises a first flange coupled to the inspection chamber; a second flange making no contact with the first flange and mounted on the carrier chamber; an outer peripheral edge region fixed at the first flange; and an inner peripheral edge region fixed at the second flange, and as a result, provided with an annular diaphragm to intercouple the flanges and close a space between the flanges. Clamps are provided to fix the outer peripheral edge region and the inner peripheral edge region of the diaphragm at the first flange and the second flange, respectively. COPYRIGHT: (C)2003,JPO