| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a linear relation between throwing power and plasma density. <P>SOLUTION: A helicon wave plasma device comprises a belljar 11 constituting a plasma generating chamber, an induction coupled coil-like antenna 12 having a coil-like part 12a arranged around the belljar 11 and being applied with a radio frequency wave under a DC field, and means for making variable the distance from the position of the coil-like part 12a of the antenna 12 to the end of the belljar 11. <P>COPYRIGHT: (C)2003,JPO |
