| 摘要 |
The present invention is directed to a flexible scanning beam imaging system. In specific embodiments, the scanning beam imaging system comprises a mask, and an objective lens having an objective lens focal point disposed between the mask and the objective lens. A field lens device is disposed before the mask to direct a light beam through the mask and focus the light beam at a field lens focal point. The field lens focal point is located between the field lens and the objective lens. One or more scanning mirrors are disposed at or near the objective lens focal point. As a result, the beam will be directed to different locations across the objective lens by the scanning mirror(s), and will travel from the objective lens substantially collimated and parallel toward a surface illuminated by the beam. This substantially collimated and parallel beam provides a large depth of field of the ablation pattern. |
