发明名称 OPTICAL COMPONENT COMPRISING SUBMICRON HOLLOW SPACES
摘要 <p>An optical component or an analytical platform includes a substrate, an array of microstructures on the substrate (3) and microchannels (15, 15') formed by side walls of adjacent microstructures, a width of the microchannels varies as a function of distance to the substrate, the width continuously decreasing with increasing distance from the substrate within at least one distance-interval. In a method for producing such a component or such a platform a substrate with an array of surface microstructures is coated in a vapor treatment in such a way that shadowing effects of the coating mechanism narrow at least partially a width of the upper parts of side walls of the microstructures thereby forming at least partially embedded microchannels.</p>
申请公布号 WO2003069381(P1) 申请公布日期 2003.08.21
申请号 CH2003000102 申请日期 2003.02.12
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