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发明名称
TREATING DEVICE
摘要
申请公布号
KR20030068566(A)
申请公布日期
2003.08.21
申请号
KR20037008686
申请日期
2003.06.26
申请人
发明人
分类号
H01L21/205;C23C16/44;C23C16/455;C23C16/458;C23C16/48;H01L21/00;H01L21/285;H01L21/687
主分类号
H01L21/205
代理机构
代理人
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地址
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