| 摘要 |
<p>An interferometer system (100) includes a beam steering element (110) positioned to direct the measurement beam (152), and not the reference beam (156). During operation, a control circuit adjusts the orientation of the beam steering element (110) in response to changes in the angular orientation of the measurement object (154). The beam steering element (110) is further positioned to direct the return reference beam (156), and not the return measurement beam (152), the return reference beam (156) contacting the beam steering element (110). The first polarizing beam splitter (130) recombines the return reference beam (156) and the return measurement beam (152) to form an output beam (190).</p> |
