THIN FILM DEPOSITION APPARATUS FOR SEMICONDUCTOR,申请号SG20000007424-传众专利搜索

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发明名称	THIN FILM DEPOSITION APPARATUS FOR SEMICONDUCTOR
摘要
申请公布号	SG98002(A1)	申请公布日期	2003.08.20
申请号	SG20000007424	申请日期	2000.12.13
申请人	IPS LTD	发明人	WON-SUNG CHOI
分类号	C23C16/455;C23C16/44;C23C16/448;H01L21/31;(IPC1-7):B01J19/00;C23C16/452	主分类号	C23C16/455
代理机构		代理人
主权项
地址

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