Electronic device sealed under vacuum containing a getter and method of operation

摘要

An electronic device (100, 101, 105, 112, 200, 300, 400) that is sealed under vacuum includes a substrate (140, 540), a transistor (120, 140) formed on the substrate (140,540), and a dielectric layer (150) covering at least a portion of the transistor (120,140). The electronic device (100, 101, 105, 112, 200, 300, 400) further includes a layer of non-evaporable getter material (181) disposed on a portion of the dielectric layer (150); and a vacuum device (130) disposed on a portion of the substrate (140,540). Electrical power pulses activate the non-evaporable getter material (181).