| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a suspension blank with wiring for a hard disk which permits etching processing of a polyimide with high accuracy. SOLUTION: In the method for manufacturing the suspension blank with wiring for the hard disk using a laminate having a threelayered structure comprising an electroconductive layer laminated, via an electrically insulating layer, on a metal layer exhibiting spring characteristics, an object of etching is immersed in an etchant and the etchant is sprayed through an liquid spray nozzle while the object of etching fixed to a jig is shaken and overflow parts for the etching bath are equipped at both left and right sides of the upper part of the bath. Thus, the liquid at the surface of the laminate to be processed is kept in a uniformly renewed state to permit etching processing of polyimide with high accuracy. COPYRIGHT: (C)2003,JPO
|
