| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum carrier capable of carrying a large diameter wafer in and out of a process chamber through the gate of the width of about a wafer diameter. SOLUTION: A tip of a curved metal tape 15 is fixed to a hand 13 for mounting the wafer/an upper stage slider 23 slidable in the same direction as a linearly slidable second straight rail 17 on the straight rail 17. The curved metal tape 15 and the second straight rail 17 are driven by timing belts 31 and 35 and magnet couplings 25 and 27 from the outside of a vacuum chamber, and are respectively slid while controlling the moving speed of the second straight rail 17 to be 1/2 of the moving speed of the hand 13. Thus, the hand 13 is projected long from a carrying chamber 2 to enter the process chamber 1 while being supported by the second straight rail 17. COPYRIGHT: (C)2003,JPO |
