| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas supplying device and method, which heats and cools a gas container from the outside, and keeps the pressure of supplied gas at a generally constant. SOLUTION: A nozzle 12 jetting a heating medium toward a bottom surface of the gas container 10 placed on an installing stand 11 is inserted in a through hole 18 provided in a center portion of the installing stand, and a heating medium discharging path for discharging the heating medium from a space between a gas container bottom surface and an installing stand upper surface is provided. The pressure and flow rate of gas supplied from the gas container are measured. When the measured flow rate exceeds an allowable flow rate change width, the temperature of the heating medium is adjusted on the basis of a difference between the measured flow rate and a reference flow rate. When the measured flow rate is within a range of the allowable flow rate change width, the temperature of the heating medium is adjusted on the basis of a difference between the measured pressure and a reference pressure. COPYRIGHT: (C)2003,JPO
|
