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发明名称
LAGEVERÄNDERUNGS-VORRICHTUNG UND -VERFAHREN FÜR EINE HALBLEITERSCHEIBE
摘要
申请公布号
AT247332(T)
申请公布日期
2003.08.15
申请号
AT19990916975T
申请日期
1999.05.03
申请人
RECIF S.A.
发明人
ASTEGNO, PIERRE;ESTEVE, EKATERINA;GAUDON, ALAIN
分类号
B65G49/07;H01L21/68;H01L21/687;(IPC1-7):H01L21/00
主分类号
B65G49/07
代理机构
代理人
主权项
地址
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