| 摘要 |
PROBLEM TO BE SOLVED: To sufficiently and electrically isolate contacts composed of gold or platinum on a CdZnTe surface from each other, in order to prevent deterioration of contrast resolution which is to be caused by leakage of signals from an adjacent contact (picture element pad). SOLUTION: A method suitable for forming metal contacts (31) at positions which are used for forming radiation detector cells on a semiconductor substrate (1) contains a step wherein at least one layer composed of materials (11, 12) is formed on a surface of the substrate together with formation of apertures (23) which reach the surface of the substrate at contact positions, a step for forming a layer composed of metal (24) on the layer composed of the materials and on the apertures, and a step wherein metal (28) coating the layer composed of the materials is eliminated and individual contacts are isolated from each other. Formation of a passivation layer (11) which is to be left between the individual contacts on the surface of the substrate may be added optionally to the method. In the method, a matter is prevented wherein corrosive solution used for eliminating unnecessary gold (or other contact materials) is brought into contact with the surface of the substrate (e.g. CdZnTe) and deteriorates resistance characteristic of the substrate. Effect and usage of the method are also described. COPYRIGHT: (C)2003,JPO
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