PLASMA TREATMENT METHOD AND APPARATUS,申请号KR20030007078-传众专利搜索

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发明名称	PLASMA TREATMENT METHOD AND APPARATUS
摘要
申请公布号	KR20030067518(A)	申请公布日期	2003.08.14
申请号	KR20030007078	申请日期	2003.02.05
申请人		发明人
分类号	H05H1/26;C23F4/00;H01J37/32	主分类号	H05H1/26
代理机构		代理人
主权项
地址

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