APPARATUS FOR MEASURING A SURFACE PROFILE

摘要

An apparatus for measuring a surface profile of an object to be measured, comprising a measuring probe (6) positioned to contact the surface of the object (2) to be measured, guide means (4) for supporting and guiding the measuring probe (6) in an axis direction of the measuring probe, tilt angle adjustment means (3) for tilting the guide means (4) at a predetermined tile angle to a horizontal direction so that the measuring probe (6) contact the surface of the object (2) to be measured with a predetermined contact force, and drive means for relatively driving at least one of the measuring probe (6) and the object (2) to scan the surface of the object (2) to be measured with the measuring probe (6), the contact force being derived from a tilt direction component of the gravity of the measuring probe (6) generated when the measuring probe (6) is tilted.