| 发明名称 |
IMPROVED SEMICONDUCTOR STRESS BUFFER COATING EDGE BEAD REMOVAL COMPOSITIONS AND METHOD FOR THEIR USE |
| 摘要 |
An edge bead remover composition that includes at least one ketone selected from the group consisting of: (Formula 1 & Formula 2); wherein R1 and R2 are independently selected from the group consisting of: methyl, ethyl, n-propyl, n-butyl, sec-butyl, and isobutyl, and wherein n equals 1 or 2; at least one ester other than lactones; and at least one lactone. |
| 申请公布号 |
WO03067631(A2) |
申请公布日期 |
2003.08.14 |
| 申请号 |
WO2003US03584 |
申请日期 |
2003.02.06 |
| 申请人 |
ARCH SPECIALTY CHEMICALS, INC. |
发明人 |
PETERSON, LAURIE, J.;HOPLA, RICHARD, L.;NAIINI, AHMAD, A.;WEBER, WILLIAM, D.;WATERSON, PAMELA, J. |
| 分类号 |
G03F7/42;C11D7/26;C11D7/50;C11D11/00;G03F7/16;G03F7/20;H01L21/027;H01L21/308;H01L21/311 |
主分类号 |
G03F7/42 |
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