| 摘要 |
<p>A movable pin (11) having a movable projection length at the front end is disposed and a plurality of probes, such as a signal probe (3) and a power supply probe (4), are disposed to extend through a metal block (1) to allow the front end of the movable pin to project at one surface side of the metal block (1). A test subject device (20) is pressed against one surface side of the metal block (1) to contact the electrode terminals (21-24) of the test subject device with the front ends of the individual probes, thereby testing the test subject device for its characteristics. At least some of these probes are formed around the outer periphery thereof with a dielectric layer and a metal film, thereby providing a capacitor load type probe having a capacitor formed therein. As a result, noise elimination can be reliably effected, and using it as a power supply probe makes it possible to suppress voltage drop across the power supply terminals even if the output varies.</p> |
