VARIABLE-SHAPE MIRROR ADJUSTING METHOD, ADJUSTING APPARATUS, AND PROCESSING PROGRAM FOR PERFORMING THE ADJUSTING METHOD

摘要

A variable shape mirror includes a mirror surface having a plurality of deformable portions which affect each other and a plurality of deformation means for deforming the plurality of deformable portions according to a control signal from outside, so that the deformable portions of the mirror surface are deformed by the deformation means and the three-dimensional shape of the mirror surface is changed by stages. When adjusting the deformation amount of the deformable portions, light emitted from a predetermined light source and reflected by the mirror surface is detected at a predetermined position and the reflected light detected is evaluated according to a predetermined reference. According to the evaluation result of the reflected light, a control signal is given to the deformation means so as to optimize the reflected light by the genetic algorithm, thereby adjusting the deformation amount of the deformable portions. Thus, it is possible to automatically adjust the work amount of the deformation means for deforming the deformable portions of the variable-shape mirror surface affecting each other so as to optimize the reflected light in a comparatively short time without requiring operation of a skilled person.