发明名称 |
Dispersion for chemical mechanical polishing |
摘要 |
In aqueous dispersion for chemical-mechanical polishing of oxide surfaces, containing a powder of pyrogenic silica doped with alumina by means of an aerosol, the powder contains 0.01-3, preferably 0.2-1.5 weight percent (wt.%) alumina and the average particle diameter of the dispersion is not more than 0.1 microns. An Independent claim is also included for production of the dispersion by dispersing the doped silica in an aqueous medium with an energy input of not less than 200 kJ/m3.
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申请公布号 |
EP1335009(A1) |
申请公布日期 |
2003.08.13 |
申请号 |
EP20020024336 |
申请日期 |
2002.11.02 |
申请人 |
DEGUSSA AG |
发明人 |
LORTZ, WOLFGANG, DR.;BATZ-SOHN, CHRISTOPH, DR.;PERLET, GABRIELE;WILL, WERNER |
分类号 |
B24B37/00;C01B33/18;C09G1/02;C09K3/14;H01L21/304;H01L21/3105;(IPC1-7):C09G1/02;C01B33/26;H01L21/306 |
主分类号 |
B24B37/00 |
代理机构 |
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代理人 |
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地址 |
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