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发明名称
DEVICE AND METHOD FOR ELECTROLESS PLATING
摘要
申请公布号
EP1335038(A1)
申请公布日期
2003.08.13
申请号
EP20010978884
申请日期
2001.10.24
申请人
EBARA CORPORATION
发明人
HONGO, AKIHISA;MISHIMA, KOJI;INOUE, HIROAKI;KIMURA, NORIO;KARIMATA, TSUTOMU
分类号
C23C18/16;C23C18/18;H01L21/288;H01L21/768;(IPC1-7):C23C18/16
主分类号
C23C18/16
代理机构
代理人
主权项
地址
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