| 摘要 |
PROBLEM TO BE SOLVED: To remove an additive by a simple method and to suppress the blocking of a gas recovery line. SOLUTION: An organic solvent and triphenylphosphate (TPP, melting point M=50°C) being the additive volatilized from a dope 13 are contained in the gas 40 discharged from the drying zone 12 of a film forming apparatus 10. The temperature T on the outlet side of a cooler 42 is regulated to a range of (M-35)≤T≤(M-5). TPP is liquefied in the cooler 42 and bonded to the inside of the cooler 42 to be removed and the concentration of TPP becomes low. Since the washing frequency of the cooler 42 can be set to one day or more by regulating the range of the outlet temperature T, the film forming apparatus 10 can be continuously operated. Further, by attaching two coolers 42 and 43 to a gas recovery line, the continuous operation of the film forming apparatus 10 becomes further possible. COPYRIGHT: (C)2003,JPO |
