| 摘要 |
PROBLEM TO BE SOLVED: To provide a product having a desired flatness without warping in one surface by grinding the surface of barely grindable thin sheet material (workpiece) having warping. SOLUTION: An elastic sheet 25 of thickness of 0.2-3 mm is placed on an electromagnetic chuck 6 provided on a slide table 4, and the workpiece 2 as a barely grindable sheet of thickness of 0.1-2.0 mm is placed on it. The workpiece is fixed by the action of magnetism of the electromagnetic chuck, and the workpiece and a rotary grinding wheel 3 are relatively moved to each other to surface-grinding the workpiece, and thus the workpiece with the processed surface side flattened is obtained. Part of the workpiece penetrates into the elastic sheet by the magnetization of the electromagnetic chuck, and the workpiece is fixed to the electromagnetic chuck as it is warped. Even when the chuck is demagnetized after grinding the surface, the ground surface is not warped, but it has a desired flatness. COPYRIGHT: (C)2003,JPO
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