| 摘要 |
A method of manufacturing a thin-film magnetic head, includes the steps of: forming, on a lower auxiliary pole, a three-layer pole tip structure consisting of a lower pole tip element, a recording gap layer and an upper pole tip element; depositing a lower insulating layer on the three-layer pole tip structure; polishing the lower insulating layer by chemical-mechanical polishing so that a top surface of the lower insulating layer is leveled lower than a top of the three-layer pole tip structure over at least a region within which a coil conductor is formed; forming the coil conductor on the lower insulating layer; forming an upper insulating to cover the coil conductor; and forming an upper auxiliary pole so that a part of which contacts to the upper pole tip element.
|
