| 摘要 |
PROBLEM TO BE SOLVED: To provide a photoelectric hybrid substrate in which an optical waveguide and an electric wiring part can be hybridized in a three-dimensional manner and a cost can be reduced. SOLUTION: In the photoelectric hybrid substrate in which the optical waveguide is formed on an electric circuit substrate, the optical waveguide is formed of a fluorine-containing polybenzoxazole resin in which a fluorine- containing polybenzoxazole precursor having a structure represented by a formula (1), is closed. Further, photoelectric hybrid substrate comprises an electric insulating material made of the fluorine-containing polybenzoxazole resin in which fluorine-containing polybenzoxazole precursor the structure represented by the formula (1), is closed. COPYRIGHT: (C)2003,JPO |
