APPARATUS AND METHOD FOR PEELING

摘要

PROBLEM TO BE SOLVED: To enable peeling in such a state that a peeling angle and a peeling state can be controlled suitably to a thin-film material which is peeled off from a substrate and transferred. SOLUTION: A portion of a sheet film 112 is pressed against the top of a support base 101 by a pressure roller 107 and the other end of the sheet film 112 is fixed to a take-up roller 103, and the take-up roller 103 is so rotated as to wind the sheet film 112 and the take-up roller 103 and pressure roller 107 are moved in a specified direction of the support base 101 to peel the sheet film 112 off from the substrate 101. COPYRIGHT: (C)2003,JPO