METHOD AND DEVICE FOR PATTERN INSPECTION

摘要

PROBLEM TO BE SOLVED: To detect foreign matter and defects with a high sensitivity and inspect and process them at high speeds by accurately detecting the displaced amount of a comparison image at high speeds in a pattern inspection technology by an image comparison.

SOLUTION: An inspected image and a reference image are divided into a plurality of image areas, respectively. By using highly reliable information on positional displacement between the divided images, the amount of positional displacement between both entire images is determined. Also, a calculation area and a calculation order for the amount of the positional displacement and the search area of the images are scheduled beforehand.

COPYRIGHT: (C)2003,JPO