发明名称 Gas supply apparatus and gas supply method
摘要 This gas supply apparatus supplies a gas by vaporizing a liquefied gas filled in a gas container. This apparatus includes an installation stand having an upper surface on which the gas container is placed; at least one nozzle which discharges a beating medium towards a bottom surface of the gas container and is provided in a hole formed in the installation stand; and a heating medium discharge path which discharges the heating medium from a space between the bottom surface of the gas container and the upper surface of the installation stand.
申请公布号 US2003145902(A1) 申请公布日期 2003.08.07
申请号 US20030353914 申请日期 2003.01.30
申请人 NIPPON SANSO CORPORATION 发明人 TANAKA JUNICHI;ORITA TAKASHI;ECHIGOJIMA MAKOTO
分类号 F17C7/00;C23C16/448;F17C7/04;F17C9/02;F17C13/02;F17C13/08;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):B65B1/20 主分类号 F17C7/00
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