发明名称 |
Gas supply apparatus and gas supply method |
摘要 |
This gas supply apparatus supplies a gas by vaporizing a liquefied gas filled in a gas container. This apparatus includes an installation stand having an upper surface on which the gas container is placed; at least one nozzle which discharges a beating medium towards a bottom surface of the gas container and is provided in a hole formed in the installation stand; and a heating medium discharge path which discharges the heating medium from a space between the bottom surface of the gas container and the upper surface of the installation stand. |
申请公布号 |
US2003145902(A1) |
申请公布日期 |
2003.08.07 |
申请号 |
US20030353914 |
申请日期 |
2003.01.30 |
申请人 |
NIPPON SANSO CORPORATION |
发明人 |
TANAKA JUNICHI;ORITA TAKASHI;ECHIGOJIMA MAKOTO |
分类号 |
F17C7/00;C23C16/448;F17C7/04;F17C9/02;F17C13/02;F17C13/08;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):B65B1/20 |
主分类号 |
F17C7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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