Flat panel detection type solid-state imaging device

摘要

A TFT array structure formed on a glass substrate employs an aluminum alloy for the wiring patterns of signal lines and scanning lines. Besides, on the glass substrate, a terminal structure is formed near the terminating end of each of the wiring patterns. The terminal structure includes a terminal pattern which is formed of the same MoW layer as that of capacitor lines of the TFT array structure. Thus, the TFT array structure holds a repair facility equal to that of the prior art while realizing the enhancement of an operating speed and the reduction of image noise owing to the lowered resistances of the scanning lines and signal lines.