Wafer position error detection and correction system
摘要
申请公布号
EP0820091(A3)
申请公布日期
2003.08.06
申请号
EP19970305275
申请日期
1997.07.14
申请人
APPLIED MATERIALS, INC.
发明人
FREERKS, FREDERICK W.;BERKEN, LLOYD M.;CRITHFIELD, UENIA M.;SCHOTT, DAVID;RICE, MICHAEL;HOLTZMAN, MICHAEL;REAMS, WILLIAM;GILJUM, RICHARD;REINKE, LANCE;BOOTH, JOHN S.
