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发明名称
Method for producing nitrogen trifluoride by gas-solid reaction
摘要
申请公布号
EP0959040(B1)
申请公布日期
2003.08.06
申请号
EP19990109947
申请日期
1999.05.20
申请人
CENTRAL GLASS COMPANY, LIMITED
发明人
TOKUNAGA, NOBUYUKI;MOROI, SHIROU;KOJIMA, KEIZO
分类号
H01L21/302;C01B21/083;(IPC1-7):C01B21/083
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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