发明名称 Methods for finishing microelectronic device packages
摘要 Methods for finishing or refurbishing surfaces on protective covers encapsulating microelectronic dies. In one embodiment, a method for fishing a surface of a protective package on a microelectronic device includes abrading the surface of the package by engaging an abrasive media with the surface of the package, terminating the abrasion when a surface blemish has been at least partially removed from the package, and cleaning residual materials from the package after terminating the abrasion of the package surface. The abrasive media can include a fixed-abrasive member, a fixed-abrasive member and a solution, a non-abrasive member and a chemical solution having abrasive particles, or an abrasive blasting media. Methods for finishing a surface of a protective package on a microelectronic device in accordance with other embodiments of the invention include ablating the surface of the package to remove a layer of material from the package, etching the surface of the package to remove a layer of material from the package, and pressing a heated surface of stamp or press having a preselected finish against the package surface to emboss the package surface. Ablating the surface of the package to remove a layer of material from the packages, for example, can include ablating the surface of the package with a laser light.
申请公布号 US6602430(B1) 申请公布日期 2003.08.05
申请号 US20000641498 申请日期 2000.08.18
申请人 MICRON TECHNOLOGY, INC. 发明人 NALLY STEVEN P.;WILLIAMS VERNON M.;GRIGG FORD B.
分类号 B24B21/04;B24B37/04;B24B57/02;H01L21/48;H01L21/56;H01L23/498;(IPC1-7):B24B1/00 主分类号 B24B21/04
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