发明名称 |
Gas bearings for use with vacuum chambers and their application in lithographic projection apparatuses |
摘要 |
A bearing for use in a vacuum chamber comprises a gas bearing discharging pressurised gas into a gap between two members to maintain a predetermined separation between those members. To avoid the gas forming the gas bearing being an unacceptable leak into the vacuum chamber, a vacuum pump is provided between the vacuum chamber and the gas bearing. |
申请公布号 |
US6603130(B1) |
申请公布日期 |
2003.08.05 |
申请号 |
US20000551223 |
申请日期 |
2000.04.17 |
申请人 |
ASML NETHERLANDS B.V. |
发明人 |
BISSCHOPS THEODORUS H. J.;VIJFVINKEL JAKOB;SOEMERS HERMANUS M. J. R.;DRIESSEN JOHANNES C.;RENKENS MICHAEL J. M.;BOUWER ADRIANUS G. |
分类号 |
F16C32/06;G03F7/20;H01L21/027;(IPC1-7):H01J37/20 |
主分类号 |
F16C32/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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