发明名称 |
Phase measuring method and apparatus |
摘要 |
A phase measuring apparatus for measuring phase characteristics of a film applied onto an object to be measured includes a shearing interference system for providing incident light onto the object or light reflected on the object with shearing interference, a detector for detecting shearing interference information, and a computing unit for calculating the phase characteristics of the film based on the shearing interference information.
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申请公布号 |
US2003144819(A1) |
申请公布日期 |
2003.07.31 |
申请号 |
US20030356231 |
申请日期 |
2003.01.31 |
申请人 |
TAKEUCHI SEIJI;SUZUKI AKIYOSHI;YOSHII MINORU |
发明人 |
TAKEUCHI SEIJI;SUZUKI AKIYOSHI;YOSHII MINORU |
分类号 |
G01J9/02;G03F7/20;(IPC1-7):G06F15/00 |
主分类号 |
G01J9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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