| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas laser in which the vibration of a laser chamber is not transferred to optical parts even when the chamber vibrates. SOLUTION: This gas laser is provided with a base plate (36), the laser chamber (12) which is mounted on the plate (36) and encloses a laser gas, and cavity plates (43A and 43B) which are mechanically fixed to the plate (36). This laser is also provided with holders (31A and 31B) which are mechanically held by the cavity plates (43A and 43B) and hold optical parts constituting a resonator, a cross flow fan (24) which circulates the laser gas in the chamber (12), and a fan driving means (35) which drives the fan (24). At least one of the cavity plates (43A and 43B), base plate (36), the housing of the driving means (35), and their fixing members is manufactured from a damping alloy. COPYRIGHT: (C)2003,JPO
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