INSPECTION DEVICE USING SCANNING ELECTRON MICROSCOPE

摘要

An inspection device (1) using a scanning electron microscope (6a) capable of nondestructively inspecting and measuring the any portion of an inspected object without being restricted by the size of the inspected object, comprising a local vacuum forming part (9) for forming a local vacuum area by shielding the periphery of the inspected portion of the inspected object from the outside air, the local vacuum forming part further comprising a discharge part for discharging air to form the local vacuum area, a raising part (14) for raising the entire part of the local vacuum forming part from the inspected object by jetting compressed gas to the outer edge portion of the local vacuum forming part, and a length measuring part (16) for measuring a distance between the inspected object and the local vacuum forming part to control the rise of the local vacuum forming part by the raising part.