| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser oscillator that can be increased in output even when its size is not increased, and to provide a laser using the oscillator. SOLUTION: In this laser oscillator, two principal discharge sections 10A and 10B are arranged in parallel with each other in a direction perpendicular to the flowing direction of a gas. In addition, the distance between the discharge sections 10A and 10B is adjusted so that the relation of a clearance ratio CR may be met. Moreover, more stable glow discharge is realized by removing the impurities contained in the gas flowing in the downstream-side principal discharge section 10B by providing a cold heater 7 between the discharge sections 10A and 10B. COPYRIGHT: (C)2003,JPO |
