| 摘要 |
PROBLEM TO BE SOLVED: To provide a strain gauge having excellent quality, and its manufacturing method, in which a sufficient oxide film is formed by heat treatment at a relatively low temperature. SOLUTION: An insulation film 3 is deposited on a diaphragm 2 composed of a metal and then a gauge film 41, a binder film 42 and an electrode film 43 are deposited sequentially thereon before heat treatment is performed under an oxidizing atmosphere. More specifically, a 99% oxygen gas is introduced into a heat treatment furnace and saturated humidity is further introduced into the furnace through water bubbling in its passage. A heat treatment temperature is set at 300°C. COPYRIGHT: (C)2003,JPO
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