| 摘要 |
PROBLEM TO BE SOLVED: To provide an object body alignment inspection device of an ion implantation system for aligning and disposing an object body, by inspecting whether inclination and a rotation angle of an object body are in the range of a set value for preventing channeling phenomenon, wherein impurity ion to be implanted to an object body is implanted to a set depth or more, and its method. SOLUTION: An object body alignment inspection device 10a has a body 12, which forms an object body shape in ion implantation process and has calibration displaying an angle from the center of an object body in an edge part, a center shaft 14 set to project from a center of the body 12 and a designating part which is set to rotate based on the center shaft 14 and designates the angle of calibration, in a direction wherein a load functions from the center of the central shaft 14. COPYRIGHT: (C)2003,JPO
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