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发明名称
Probe station
摘要
A probe station.          &e nsp;   &ensp
申请公布号
US2003141861(A1)
申请公布日期
2003.07.31
申请号
US20020285135
申请日期
2002.10.30
申请人
NAVRATIL PETER;FROEMKE BRAD;STEWART CRAIG;LORD ANTHONY;SPENCER JEFF;RUNBAUGH SCOTT;FISHER GAVIN;MCCANN PETE;JONES ROD
发明人
NAVRATIL PETER;FROEMKE BRAD;STEWART CRAIG;LORD ANTHONY;SPENCER JEFF;RUNBAUGH SCOTT;FISHER GAVIN;MCCANN PETE;JONES ROD
分类号
G01R1/18;G01R31/02;G01R31/28;G01R31/311;H01L21/66;(IPC1-7):G01R1/00
主分类号
G01R1/18
代理机构
代理人
主权项
地址
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