HEAT TREATMENT DEVICE,申请号JP19860195314-传众专利搜索

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发明名称	HEAT TREATMENT DEVICE
摘要
申请公布号	JPS6352408(A)	申请公布日期	1988.03.05
申请号	JP19860195314	申请日期	1986.08.22
申请人	HITACHI LTD	发明人	TAKAGAKI TETSUYA;MAEJIMA HIROSHI;UCHINO TOSHIYUKI
分类号	H01L21/22;H01L21/223	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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