| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe device capable of automatically acquiring individual information regarding a probe card to be used on a probe device side without the need of substantially changing device constitution and performing appropriate handling corresponding to the kind, machine difference and using history, etc., of the probe card. SOLUTION: To the probe card 4, a card side radio communication mechanism 47 is stuck. Inside the case body 2 of the probe device, a radio communication mechanism 25 for radio-communicating with the card side radio communication mechanism 47, reading the information regarding each probe card 4 and rewriting the information regarding the using history as needed is provided. The information read from the card side radio communication mechanism 47 by the radio communication mechanism 25 is sent to a control part 26 for controlling the entire operations of the probe device and the information for rewriting the information of the card side radio communication mechanism 47 is sent from the control part 26 to the radio communication mechanism 25. COPYRIGHT: (C)2003,JPO
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