发明名称 |
METHOD OF MANUFACTURING AN EMITTER |
摘要 |
An emitter includes an electron supply and a tunneling layer disposed on the electron supply. A cathode layer is disposed on the tunneling layer. A conductive electrode has multiple layers of conductive material. The multiple layers include a protective layer disposed on the cathode layer. The conductive electrode has been etched to define an opening thereby exposing a portion of the cathode layer.
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申请公布号 |
US2003143788(A1) |
申请公布日期 |
2003.07.31 |
申请号 |
US20020066149 |
申请日期 |
2002.01.31 |
申请人 |
CHEN ZHIZHANG;BENNING PAUL J.;RAMAMOORTHI SRIRAM;NOVET THOMAS |
发明人 |
CHEN ZHIZHANG;BENNING PAUL J.;RAMAMOORTHI SRIRAM;NOVET THOMAS |
分类号 |
H01J29/04;G11C11/23;H01J1/312;H01J9/02;H01J31/12;(IPC1-7):H01L21/338 |
主分类号 |
H01J29/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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